Monolithic micromachined piezoelectric acoustic transducer and transducer array and method of making same
US5956292A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 16, 1997 |
| Grant date | Sep 21, 1999 |
| Priority date | — |
| Expiry date | Sep 16, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A monolithic micromechanical piezoelectric acoustic transducer with integrated control circuit includes a support member; a piezoelectric medium disposed on the support member; first and second electrodes engaging the piezoelectric medium; and a control circuit monolithically integrated with the piezoelectric medium and electrodes on the support member and including a switching circuit for selectively interconnecting the electrodes with an I/O bus and a signal processing circuit for conditioning signals propagating between the electrodes and the I/O bus; an array of such acoustic transducers that form an acoustic retina; and a method of making such transducers and arrays.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.