Solid-state chemical sensor

US5958340A · kind A · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Joerg Meyer · Wagenfeld, DE
• Andrea Haeusler · Lübeck, DE

Key dates

• Filing date: Jun 5, 1998
• Grant date: Sep 28, 1999
• Expiry date: Jun 5, 2018

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N27/12
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention pertains to a solid-state chemical sensor with a substrate support. On one side of the support is mounted a heating element with branch circuit connections. On the other side interdigital electrodes are arranged and thereon a carbon dioxide-sensitive material, which comprises CuO and TiO.sub.3, as well as additional metal oxides, in the form of a thick film of approximately 20-200 .mu.m.