Edge termination for zener-clamped power device
US5959345A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 28, 1997 |
| Grant date | Sep 28, 1999 |
| Priority date | — |
| Expiry date | Nov 28, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor power device (100) that includes a number of bipolar or FET power devices (116), an over-voltage clamp (118), and an edge termination structure (110) that separates the power devices (116) and the over-voltage clamp (118). The power devices (116) are formed in an interior region (100a) of a semiconductor substrate (128), while the over-voltage clamp (118) is formed in a peripheral region (100b) of the substrate. The over-voltage clamp (118) and the gate/base terminals of the power devices (116) are formed in a polysilicon layer (126) overlying the substrate (128), such that the over-voltage clamp (118) is connected between the anode and gate/base terminals of each power device (116) to provide over-voltage protection. The edge termination structure (110) is formed in the substrate (128) so as to completely surround the interior region (100a) of the substrate (128), and therefore surrounds the power devices (116) to form a continuous barrier structure between the power devices (116) and the over-voltage clamp (118). The edge termination structure (110) includes a main junction (112) and at least one field-limiting ring (114), each of which is formed by a continuous w…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.