Large area energy beam intensity profiler
US5959725A · kind A · utility
3Cited by
12References
28Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 4, 1998 |
| Grant date | Sep 28, 1999 |
| Priority date | — |
| Expiry date | Feb 4, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J1/4257
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A large area energy beam intensity profiler and method of profiling are disclosed. The profiler includes intensity detectors which generate electrical signals corresponding to the intensity of the beam. The output of the detectors is processed by a computer and displayed on a monitor. The invention provides for adjustment of the beam in response to a nonuniform intensity profile, or an indication that the beam is misaligned.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.