Method for treating silane-containing gas
US5961695A · kind A · utility
5Cited by
5References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 25, 1998 |
| Grant date | Oct 5, 1999 |
| Priority date | — |
| Expiry date | Mar 25, 2018 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07F7/20
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
A silane-containing gas is treated by contacting it with a liquid containing silanes or disilanes which are higher boiling than the silanes in the silane-containing gas, thereby easily removing or reducing the amount of silanes in the gas and enabling the recovery of these silanes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.