Pane of transparent material having a low emissivity

US5962115A · kind A · utility

Assignee

• Balzers und Leybold Duetschland Holding AG · DE

Inventors

• Anton Zmelty · Hösbach, DE
• Joachim Szczyrbowski · Goldbach, DE
• Christoph Braatz · Großkrotzenburg, DE

Key dates

• Filing date: Jun 10, 1996
• Grant date: Oct 5, 1999
• Expiry date: Jun 10, 2016

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/265
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A system of layers applied to a transparent substrate includes a first layer of an oxide such as ZnO or SnO.sub.2, a second layer of a substoichiometric oxide of Zn or Ta, a third layer of Ag or Cu, a fourth layer of a substoichiometric oxide of Ti, Cr, or Nb, and a fifth layer of similar composition as the first layer. The layers are preferably deposited by magnetron cathode sputtering in an atmosphere which consists of inert gas and, in the case of the oxide layers, a reactive gas.