Radiation sensitive composition
US5962180A · kind A · utility
22Cited by
8References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 26, 1997 |
| Grant date | Oct 5, 1999 |
| Priority date | — |
| Expiry date | Feb 26, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/111
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A radiation sensitive composition comprising (A) a copolymer comprising recurring units of a p-hydroxystyrene unit and a styrene unit having an acetal group or a ketal group at the p-position, (B) a copolymer comprising recurring units of a t-butyl (meth)acrylate unit and a p-hydroxystyrene unit, and (C) a radiation sensitive acid-generating agent.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.