Infrared sensor and infrared detector
US5962854A · kind A · utility
79Cited by
4References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 12, 1997 |
| Grant date | Oct 5, 1999 |
| Priority date | — |
| Expiry date | Jun 12, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/48091
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A chip-shaped infrared sensor comprising a substrate formed with a cavity, an infrared radiation receiving portion supported in the form of a micro air bridge in the cavity by four hook-shaped beam portions extending from the substrate, two thermistor films for infrared radiation detection formed on the infrared radiation receiving portion, two thermistor films for temperature compensation arranged on the substrate, and a single thermistor film arranged on the substrate for detecting temperature of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.