Method and system for enhancing the identification of causes of variations in the performance of manufactured articles
US5963881A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 20, 1997 |
| Grant date | Oct 5, 1999 |
| Priority date | — |
| Expiry date | Oct 20, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/20
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In a system (12) wherein articles are manufactured by a plurality of process steps (20, 22, & 24), a method for identifying causes of variations in performance of the manufactured articles is provided. The method includes tracking orientation data (48) for the articles during each of the process steps (20, 22, & 24) and then measuring (50) performance data for each of the articles. The method also includes preparing surface performance characteristic maps (54) for each of the articles from the performance data and ordering the surface performance characteristic maps (56) for each of the articles in accordance with the orientation data for each article at a given process step (20, 22, & 24).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.