Process and apparatus for the treatment of perfluorinated and hydrofluorocarbon gases for the purpose of destroying them
US5965786A · kind A · utility
25Cited by
4References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 28, 1997 |
| Grant date | Oct 12, 1999 |
| Priority date | — |
| Expiry date | Jul 28, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A process for treating perfluorinated and/or hydrofluorocarbon gases, comprising the steps of PA1 creating an atmospheric-pressure gas plasma in at least one hollow dielectric tube; PA1 making the gases to be treated flow through the at least one dielectric tube in contact with the plasma for the purpose of dissociating molecules of the gases into reactive compounds; and PA1 reacting the reactive compounds with a corresponding reactive element for the purpose of destroying them.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.