Flow sensor
US5965812A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 29, 1997 |
| Grant date | Oct 12, 1999 |
| Priority date | — |
| Expiry date | Dec 29, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/6845
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a flow sensor for sensing heat transfer with a high-speed response, which is manufactured by applying IC micro-machining technology, and which attains an improved heat transfer efficiency by controlling the flow's direction between a heating portion and a sensing portion or by utilizing the intrinsic characteristics of the gas flow. A flow sensor having a substrate whereon a heating portion and a sensing portion are formed each in the form of a bridge supported at both ends or at one end in said order in the direction of the flowing gas to be measured, and which is placed, its surface with the elements down, at the upper inside wall of a pipe for gas to be measured. Its output signal is taken out through lead wires.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.