Patent · US Expired

Gas discharge lamps fabricated by micromachined transparent substrates

US5965976A · kind A · utility

1Cited by
2References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 19, 1997
Grant dateOct 12, 1999
Priority date
Expiry dateDec 19, 2017

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01S3/0973
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A high pressure gas discharge lamp and the method of making same utilizing integrated circuit fabrication techniques. The lamp is manufactured from heat and pressure resistant planar substrates in which cavities are etched, by integrated circuit manufacturing techniques, so as to provide a cavity forming the gas discharge tube. Electrodes are deposited in the cavity. The cavity is filled with gas discharge materials such as mercury vapor, sodium vapor or metal halide. The substrates are bonded together and channels may be etched in the substrate so as to provide a means for connection to the electrodes. Lamps having ignition enhancing and hot restrike features, as well as single-sided electrodes, are disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.