Vertical cavity surface emitting laser with integrated diffractive lens and method of fabrication
US5966399A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 2, 1997 |
| Grant date | Oct 12, 1999 |
| Priority date | — |
| Expiry date | Oct 2, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/2059
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
VCSEL with integrated lens element and method of fabrication including a substrate element, a first stack of distributed Bragg reflectors disposed on a surface of the substrate element, an active region lattice matched to a surface of the first stack of distributed Bragg reflectors, and a second stack of distributed Bragg reflectors lattice matched to a surface of the active region. The active region includes at least one quantum well layer and a plurality of barrier layers. A lens element is integrated with the VCSEL structure being etched directly into an uppermost surface of the second stack of distributed Bragg reflectors or etched into a layer of silicon nitride (SiN) disposed on an uppermost surface of the second stack of distributed Bragg reflectors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.