Optical near-field probe and process for its manufacture

US5966482A · kind A · utility

Assignees

• Institut für Mikrotechnik Mainz GmbH · DE
• Omicron Vakuumphysik GmbH · DE

Inventors

• Wilfried Noell · Neuchâtel, CH
• Alexander Ruf · Dresden, DE
• Karsten Mayr · Wiesbaden, DE
• Peter Güthner · Taunusstein, DE

Key dates

• Filing date: Jul 11, 1997
• Grant date: Oct 12, 1999
• Expiry date: Jul 11, 2017

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B82Y35/00
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

An optical near-field probe (1) includes a carrier component (10), which carries a tip (40), and has only one membrane (11, 20), transparent at least in the area of the tip (40), which is mounted on the light emission surface (9) of an optical waveguide (2) that is made of a rigid material such as glass or plastic. The dimensions of the membrane (11, 20), at least in one direction in the membrane plane, are less than or equal to the diameter of the optical waveguide (2). To position the tip (40) over the core (3) of the optical waveguide (2), optical methods can be used or the membrane and optical waveguide can be provided with locating elements.