Coordinate measuring apparatus and method for controlling the same

US5966681A · kind A · utility

Assignee

• Carl Zeiss Stiftung · DE

Inventors

• Ralf Bernhardt · Aalen, DE
• Otto Ruck · Ellwangen (Jagst), DE
• Gunter Grupp · Böhmenkirch, DE

Key dates

• Filing date: Dec 18, 1997
• Grant date: Oct 12, 1999
• Expiry date: Dec 18, 2017

Classification

• Technology area (CPC G): Physics
• CPC primary: G05B19/401
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention is directed to a method which is provided for controlling coordinate measuring apparatus wherein a probe head (2) is moved and has a movably attached probe unit (24) attached thereto. The probe unit (24) is charged with a measurement force Fmeas relative to the probe head (2). The measurement force Fmeas operates against the mass inertial forces Fzp which occur because of acceleration of the probe. The measurement force Fmeas is comprised of a desired measurement force Fdes and a corrective measurement force Fcorr. The desired measurement force Fdes is constant in magnitude and is directed perpendicularly to the surface of the workpiece (15) to be measured. The corrective measurement force Fcorr at least partially compensates for the mass inertial forces (Ftr, Fzp) which occur because of the acceleration of the probe unit (24).