Process for producing a probe-driving mechanism
US5966787A · kind A · utility
34Cited by
15References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 8, 1996 |
| Grant date | Oct 19, 1999 |
| Priority date | — |
| Expiry date | May 8, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A process for producing a probe-driving mechanism. A laminate of a first and second insulating layer is placed on a support. Electrode layers and piezoelectric layers are successively laminated on the second insulating layer. Part of the support and second insulating layer is removed to form a cantilever.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.