Tool for the contact-free support of plate-like substrates
US5967578A · kind A · utility
34Cited by
7References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 29, 1998 |
| Grant date | Oct 19, 1999 |
| Priority date | — |
| Expiry date | May 29, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention relates to a tool for the free support of plate-like substrates, comprising a flat plate-like body with at least one supporting surface wherein at least one gas channel is provided within the body, extending from an outer gas supply end to an inner gas discharge end, the gas discharge end being in fluid communication with a gas distribution chamber, through which gas passes into a dynamically balanced gas slit being arranged radially with respect to the gas distribution chamber predominantly parallel to the supporting surface and opening into the supporting surface at its outer end at an angle >90 and <180.degree..
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.