Sensor for monitoring concentration of gaseous substances

US5969231A · kind A · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Wenmin Qu · Dresden, DE
• Jorg Meyer · Aachen, DE

Key dates

• Filing date: Mar 17, 1997
• Grant date: Oct 19, 1999
• Expiry date: Mar 17, 2017

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N27/4075
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention provides a sensor arrangement for monitoring the concentrat of moisture and gaseous substances in ambient air. A gas sensitive intermediate layer is sandwiched between top and bottom electrodes, each of which comprises first and second interdigitated conductive elements, which are coupled to an opposite polarity voltage. The top and bottom electrodes are super-imposed on opposite sides of the gas-sensitive intermediate layer, with fingers of the top electrode having a voltage polarity which is opposite that of adjacent super-imposed fingers of the bottom electrode.