Thermoelectric microprobe
US5969238A · kind A · utility
31Cited by
6References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 29, 1997 |
| Grant date | Oct 19, 1999 |
| Priority date | — |
| Expiry date | Aug 29, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/875
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microprobe for thermoelectric microscopic measurements comprises a probe body (11), which consists of a doped or intrinsically conductive semiconductor material and has at least one thermoelectric contact surface (19). The probe body (11) can carry a metal or semiconductor layer (17), which is separated from the probe body (11) by an insulating layer (16) except in the area of the thermoelectric contact surface (19). A process for the production of a microprobe for thermoelectric microscopic measurements is also given.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.