Adjusting operating characteristics of micromachined torsional oscillators
US5969465A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 1, 1998 |
| Grant date | Oct 19, 1999 |
| Priority date | — |
| Expiry date | Apr 1, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/0167
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An improved micromachined structure used for beam scanners, gyroscopes, etc. includes a reference member from which project a first pair of axially aligned torsion bars. A first dynamic member, coupled to and supported from the reference member by the torsion bars, oscillates in one-dimension about the torsion bar's axis. A second dynamic member may be supported from the first dynamic member by a second pair of axially aligned torsion bars for two-dimensional oscillation. The dynamic members respectively exhibit a plurality of vibrational modes each having a frequency and a Q. The improvement includes means for altering a characteristic of the dynamic member's frequency and Q. Coupling between dynamic members permits altering the second dynamic member's frequency and Q by techniques applied to the first dynamic member. Some techniques disclosed also increase oscillation amplitude or reduce driving voltage, and also increase mechanical ruggedness of the structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.