Method and apparatus for measuring threshold characteristic of semiconductor integrated circuit
US5970074A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 27, 1996 |
| Grant date | Oct 19, 1999 |
| Priority date | — |
| Expiry date | Jun 27, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
To measure the threshold characteristics of an integrated circuit processing a Schmitt circuit at the input side, a clock signal generated from a signal generator is fed to the integrated circuit, and a change of a power source current supplied from a power source circuit to the integrated circuit is detected by a change detector. A control circuit sets the amplitude of a clock signal generated by a driver circuit through digital-to-analog converting circuits. Initially, the voltages of the signal at the high level side and low level side are both set at 0.00 V, and when the voltage of the signal at the high level side, increasing by 0.01 V at a time, reaches the threshold of the Schmitt circuit, a large power source current flows, and a voltage change between the ends of a resistor is detected. As a part of a function test of a test apparatus, the threshold characteristic of the integrated circuit is measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.