Patent · US Expired

Apparatus for heating a transparent substrate utilizing an incandescent lamp and a heating disk emitting infrared wavelengths

US5970213A · kind A · utility

5Cited by

5References

15Claims

0Family size

Assignee

Balzers und Leybold Duetschland Holding AG · DE

Inventors

Bernhard Cord · Alzenau, DE
Karl-Heinz Schuller · Obertshausen, DE
Jaroslav Zejda · Rodenbach, DE

Key dates

Filing date	Mar 1, 1994
Grant date	Oct 19, 1999
Priority date	—
Expiry date	Mar 1, 2014

Classification

Technology area (CPC H)Electricity
CPC primaryH05B3/0047
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A heating disk is located inside a vacuum chamber between a substrate holder inside the chamber and a lamp outside the chamber. The lamp emits radiation in a wavelength range which passes through a glass plate in the chamber wall but is absorbed by the heating disk, which may consist of graphite. When the disk is heated to 1000.degree. K. it emits radiation in a wavelength range which can be absorbed by a transparent substrate in the holder.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.