Process for producing semiconductor device having porous regions
US5970361A · kind A · utility
38Cited by
11References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 28, 1997 |
| Grant date | Oct 19, 1999 |
| Priority date | — |
| Expiry date | Apr 28, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/96
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed are a semiconductor device having a porous member as an active region, the porous member comprising a plurality of porous regions having different structures or compositions; and a process for producing a semiconductor device, comprising a step of modifying partially a non-porous substrate, and a subsequent step of making the substrate porous.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.