Tweezer position checker
US5970807A · kind A · utility
6Cited by
9References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 26, 1996 |
| Grant date | Oct 26, 1999 |
| Priority date | — |
| Expiry date | Aug 26, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67781
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and apparatus to gage the spacing between a plurality of handling elements used for transferring planar objects into and out of holding receptacles in a semiconductor process. The handling tweezers are moved to a checking location and fit interleaved with the gage apparatus. If the handling tweezers do not fit, the tweezers are moved to an accessible maintenance location for alignment and recalibration enabling its use for transferring semiconductor wafers to and from wafer holding receptacles in a chemical vapor deposition vertical diffusion furnace.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.