Cathodic arc vapor deposition apparatus (annular cathode)
US5972185A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 30, 1997 |
| Grant date | Oct 26, 1999 |
| Priority date | — |
| Expiry date | Aug 30, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3266
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
According to the present invention, an apparatus for applying material by cathodic arc vapor deposition to a substrate is provided which includes a vessel, apparatus for maintaining a vacuum in the vessel, an annular cathode having a bore and an evaporative surface extending between first and second end surfaces, apparatus for selectively sustaining an arc of electrical energy between the cathode and an anode, and apparatus for steering the arc around the evaporative surface. The apparatus for steering the arc is positioned within the cathode bore, and produces a magnetic field that runs substantially parallel to the evaporative surface. The annular cathode is disposed radially inside of, and aligned with, the substrates inside the vessel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.