Process for forming low thermal expansion pyrolytic nitride coatings on low thermal expansion materials and coated article
US5972511A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 2, 1996 |
| Grant date | Oct 26, 1999 |
| Priority date | — |
| Expiry date | Apr 2, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A coated article of a stoichiometric coating composition of pyrolytic PB(Si)N on low thermal expansion carbon, graphite or ceramic materials and process of forming the coated article. The process involves introducing reactant vapors, under appropriate deposition conditions, within a heated furnace chamber containing the article to be coated. The reactant vapors are composed of ammonia, a gaseous source of boron and silicon and a diluent gas and are fed at a gas flow rate such that the combined flow rate of boron and silicon is less than the flow rate of ammonia.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.