Array of photosensitive pixels
US5973312A · kind A · utility
31Cited by
2References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 12, 1998 |
| Grant date | Oct 26, 1999 |
| Priority date | — |
| Expiry date | Feb 12, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/803
Abstract
The array comprises an insulating substrate with diode-capacitor pixels disposed over conductors on the substrate. A single mask is used to etch the pixel stacks, and each pixel stack is wider than the conductor beneath. As a result, the mask alignment does not influence the pixel characteristics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.