Patent · US Expired

Interferometric arrangement for scanning an object

US5973781A · kind A · utility

26Cited by

3References

9Claims

0Family size

Assignee

Carl Zeiss Jena GmbH · DE

Inventors

Beate Moeller · Jena, DE
Guenter Rudolph · Jena, DE

Key dates

Filing date	Feb 9, 1998
Grant date	Oct 26, 1999
Priority date	—
Expiry date	Feb 9, 2018

Classification

Technology area (CPC G)Physics
CPC primaryG01J9/02
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An interferometric arrangement for scanning an object with an illumination beam path comprises a diffractive optical element (DOE) for generating differently directed beam components of the illuminating light. The DOE is arranged in the illumination beam path in front of at least one scanning element deflecting the illuminating light in at least one direction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.