Fused silica high pressure sensor
US5974894A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 13, 1998 |
| Grant date | Nov 2, 1999 |
| Priority date | — |
| Expiry date | Jul 13, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0075
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A basic pressure sensor of four fused silica discs and two defined interior cavities. The discs are bonded to one another by a cold metal film metallization. The film metallization in spaced apart discs define capacitor electrodes where a central metallization film is a common electrode and the other metallization films define separate capacitor electrodes. For a high pressure capacitance pressure sensor, end cap discs are relatively thick and are supported by an annular ring surface on interior discs which also have a small central cavity. Pressure acting on the discs develops compressive forces which change the volume of the central cavities and the capacitance as a function of pressure. For low pressure capacitance pressure sensors, the end caps are relatively thin and flex to change a capacitance relationship defined by the bonding films. A reference capacitor can be incorporated by use of an additional electrode disc.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.