Method of making structured surface with peak-shaped elements
US5975976A · kind A · utility
7Cited by
3References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 28, 1998 |
| Grant date | Nov 2, 1999 |
| Priority date | — |
| Expiry date | Apr 28, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J9/025
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Structured surface, having a support layer and, connected electrically to it, peak-shaped elements, each peak-shaped element exhibiting a cylindrical or conical shaped stem region adjacent to the support layer and at least two, preferably 2 to 4 peaks at the free end of the stem region. The structured surface is suitable in particular as electron emission source for ultra-flat image screens, for electron lithography or for scanning or transmission microscopy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.