Method and apparatus for removing die from an expanded wafer and conveying die to a pickup location
US5976306A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 18, 1998 |
| Grant date | Nov 2, 1999 |
| Priority date | — |
| Expiry date | Feb 18, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1983
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A direct die feeder picks known good die from an expanded wafer and places them on a conveyor belt, which conveys the die to a pickup location. Frame (111) supports an expanded wafer (105) which is a wafer that is sawed and adhered onto a flexible film, which is then stretched and mounted in a ring (110). A fork member (125), on which a pick head (150) is mounted slides along an x-axis and frame (111) slides along a vertical axis to allow the pick head (150) to access any die from the expanded wafer. A camera (160) is directed downward at a 45.degree. mirror adjacent to the pick head to capture images of the wafer and determine the precise locations of known good die on the wafer. The pick head (150) can pick die from the wafer and place them directly on the conveyor belt (170) in the conventional orientation, or pass the die to a transfer head (155) which then shifts to the left and lowers the die down past the pick head, placing the die on the conveyor belt in the flipped orientation. The conveyor belt operates until a die is detected at a pickup location (173) at one end of the conveyor except during placing operations of the pick head or transfer head.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.