Method and apparatus for insulating material using trenches

US5977609A · kind A · utility

Assignee

• Telefonaktiebolaget LM Ericsson (Publ) · SE

Inventors

• Anders Soderbarg · Uppsala, SE
• Nils Ogren · Sundbyberg, SE
• Håkan Sjödin · Knivsta, SE
• Mikael Zackrisson · Rimbo, SE

Key dates

• Filing date: Mar 23, 1998
• Grant date: Nov 2, 1999
• Expiry date: Mar 23, 2018

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/763
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

An island of material has an insulating trench structure. The trench structure includes a first insulating trench surrounded by a second insulating trench. The trenches are joined together by at least two transverse linking trenches.