Handheld atmospheric pressure glow discharge plasma source
US5977715A · kind A · utility
72Cited by
9References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 14, 1995 |
| Grant date | Nov 2, 1999 |
| Priority date | — |
| Expiry date | Dec 14, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/52
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A handheld atmospheric pressure glow discharge plasma source is provided without the use of an arc. The plasma is induced using a radio frequency signal. An LC resonator in the handheld source with a gain of about 10 at 13.56 MHZ improves the power transfer from a power supply and tuner to the plasma chamber which is capable of producing stable plasmas in Ar, He and O.sub.2 mixtures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.