Methods and apparatus for polishing using an improved plate stabilizer
US5980366A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 8, 1997 |
| Grant date | Nov 9, 1999 |
| Priority date | — |
| Expiry date | Dec 8, 2017 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B41/042
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A plate stabilizing apparatus is provided which comprises a lateral support structure conflgured to adjust plate alignment which engages vertical rails secured to a polishing machine housing. thus effectively stabilizing the polishing plate while allowing vertical movement of the plate assembly. In a preferred embodiment, a plate stabilizing apparatus includes an alignment plate secured to a subcylinder close to and axially aligned with the polishing plate universal joint. Adjustment screws are provided for lateral adjustment of the polishing plate which is secured to a substantially rigid lateral support structure. The lateral support structure rides within vertical rails secured to the inner housing walls of the polishing apparatus thus allowing vertical movement of the polishing plate during operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.