Interface apparatus for automatic test equipment with positioning modules incorporating kinematic surfaces

US5982182A · kind A · utility

Inventors

• Michael A. Chiu · Somerville, US
• David Levy · Broussard, US
• Alexander H. Slocum · Bow, US

Key dates

• Filing date: Mar 31, 1995
• Grant date: Nov 9, 1999
• Expiry date: Mar 31, 2015

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2887
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A kinematic coupling for a test system with a test head which must be docked with a handling device. The coupling is implemented with a plurality of modules attached to the test head. Each module has one kinematic surface and is designed to mate with another kinematic surface on the handling device. Each module includes a motor which can extend or retract the kinematic surface. These modules allow docking of the test head to the handling device with a final motion perpendicular to the handler. They also allow the tilt angle between the test head and the handler to be adjusted to achieve planarization.