Process and device for high-definition measurement of intervals in the focused image produced by a lens-aperture diaphragm system

US5982483A · kind A · utility

Assignees

• Norbert Lauinger · DE
• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Norbert Lauinger · Wetzlar, DE
• Hans-Otto Carmesin · Bremen, DE
• Eckhard Görnitz · Teltow, DE
• Sigurd Kusch · Berlin, DE
• Manfred Pinnow · Teltow, DE

Key dates

• Filing date: Jul 27, 1998
• Grant date: Nov 9, 1999
• Expiry date: Jul 27, 2018

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P3/36
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a method and apparatus for determining spatial aor time intervals in the focused image or focused sequence of images of a lens-diaphragm system and/or of spatial, time-related object-parameters (10), spectral and/or local frequency-specific object parameters, in particular to control automatons and to monitor production sequences, focusing of the incident electromagnetic beams being implemented by the lens-diaphragm system (10), position-specific modulation of the direction of propagation, intensity, wavelength, polarization and/or of the time modulation frequency of the electromagnetic beams (11) being implemented by a 3D modulator (12) present behind the lens-diaphragm system (10) in or near the focal plane of the lens-diaphragm system (10), detection of the modulated electromagnetic beams being carried out by a detection system (13) located to the rear of the 3D modulator (12), and calculation of the spatial and/or time intervals (14) of the electromagnetic beams in the 3D modulator (12) being implemented by determining the modulation and/or computation of spatial, time-related, spectral and/or local frequency specific object-parameters