Rotary electrostatic microactuator with optimum flexure arrangement
US5982585A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 30, 1997 |
| Grant date | Nov 9, 1999 |
| Priority date | — |
| Expiry date | Dec 30, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/5552
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A rotary microactuator includes a movable structure having a center of rotation about which the movable structure rotates, a stationary structure formed on a substrate, and a flexure member attaching the movable structure to the attachment structure of the stationary structure. The stationary structure has an attachment structure having an area including the center of rotation of the movable structure and having an attachment surface enclosing the center of rotation. The flexure member includes at least one flexure element. Each flexure element is attached to the attachment surface of the attachment structure and extends radially to the movable structure. A distance between the center of rotation of the movable structure and a point on the attachment surface of the stationary structure where one end of a flexure element is attached being shorter than a length of the flexure element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.