Microscope for compliance measurement
US5983712A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Aug 4, 1997 |
| Grant date | Nov 16, 1999 |
| Priority date | — |
| Expiry date | Aug 4, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/934
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An atomic force microscope and method of operation are provided and include a force sensing probe tip adapted to be brought into close proximity with a sample surface, a scanning element for generating relative movement between the probe tip and the sample surface, a device for generating a magnetic field to cause deflection of the probe tip, a driver for the device, the driver including a source of alternating current and a source of a second current of a controlled magnitude, and a detector for detecting the position of the probe tip. In a preferred mode of operation, two signals, one of alternating current and the other of a fixed, but variable, current, are applied to cause a displacement of the time-average position of the probe tip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.