Cleaning method and apparatus for the same
US5983909A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 26, 1998 |
| Grant date | Nov 16, 1999 |
| Priority date | — |
| Expiry date | Aug 26, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
An aqueous oxidizing acidic cleaning solution or an aqueous oxidizing alkaline cleaning solution is produced by mixing an acidic or alkaline solution with ozone water. An aqueous reducing acidic cleaning solution or an aqueous reducing alkaline cleaning solution is produced by mixing an acidic or alkaline solution with hydrogen water. Each of these aqueous cleaning solutions has effective cleaning power and the ORP and pH values thereof are separately controlled. Therefore, by selecting an appropriate aqueous cleaning solution according to the types of contaminants adhering to subjects during each manufacturing step, a plurality of types of contaminants can be removed by washing with one type of aqueous cleaning solution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.