Array of thin film actuated mirrors for use in an optical projection system and method for the manufacture thereof
US5984481A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 10, 1998 |
| Grant date | Nov 16, 1999 |
| Priority date | — |
| Expiry date | Sep 10, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An array of M.times.N thin film actuated mirrors for use in an optical projection system comprises an active matrix, an array of M.times.N thin film actuating structures, and an array of M.times.N mirror layers for reflecting light beams, each of the mirror layers further including a first side, a second opposing side and a center portion located therebetween, wherein the first side and the second opposited side of each of the mirror layers are secured on top of the first and second actuating parts of each of the actuating structures, respectively, such that when the first and second actuating parts in each of the actuating structures deform in response to an electrical signal applied between the first and second electrodes, the center portion of the corresponding mirror layer tilts while remaining planar, thereby allowing all of the center portion to reflect the light beams, resulting in an increased optical efficiency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.