Patent · US Expired

Chemical etching of fiber probe

US5985166A · kind A · utility

55Cited by
3References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 29, 1997
Grant dateNov 16, 1999
Priority date
Expiry dateOct 29, 2017

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/889
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

A two-phase etching system having an etchant solution and an overlayer of a protective solvent. The physical properties of the etchant solution and the protective solvent are matched to form a substantially flat meniscus on the top surface of the etchant solution around a fiber immersed in the protective solvent and the etchant solution. Convective flows within the etchant solution are maintained to form a smooth and sharp fiber probe with a small tip apex.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.