Chemical etching of fiber probe
US5985166A · kind A · utility
55Cited by
3References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 29, 1997 |
| Grant date | Nov 16, 1999 |
| Priority date | — |
| Expiry date | Oct 29, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/889
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A two-phase etching system having an etchant solution and an overlayer of a protective solvent. The physical properties of the etchant solution and the protective solvent are matched to form a substantially flat meniscus on the top surface of the etchant solution around a fiber immersed in the protective solvent and the etchant solution. Convective flows within the etchant solution are maintained to form a smooth and sharp fiber probe with a small tip apex.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.