Method and device for manufacturing a thin film and magnetic recording medium
US5985423A · kind A · utility
2Cited by
5References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 8, 1998 |
| Grant date | Nov 16, 1999 |
| Priority date | — |
| Expiry date | Jan 8, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/265
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method and a device for manufacturing a thin film by a vacuum deposition method, and a magnetic recording medium produced thereby are disclosed. A thin film of high quality is mass-produced while introducing reaction gas to a thin film forming section from a nozzle consisting of minute tubes, so that the flow of evaporated atoms is not disturbed by the reaction gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.