Creating surface topography on an electrostatic chuck with a mandrel
US5986873A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 1, 1996 |
| Grant date | Nov 16, 1999 |
| Priority date | — |
| Expiry date | Jul 1, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention includes an electrostatic chuck having surface topography and a method of making the same including the steps of providing a first insulative layer and a conductive layer laminated thereto. The first insulative layer is secured to a pedestal. A second insulative layer is deposited over the conductive layer and the first and second insulative layer and the copper layer are laminated together by a mandrel. The mandrel has recesses formed therein to produce an electrostatic chuck having a surface topography including raised features. The mandrel may have an annular groove defined therein for producing a raised gasket defined in the second insulative layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.