Gas containment and delivery system
US5988208A · kind A · utility
5Cited by
4References
15Claims
0Family size
Inventors
Key dates
| Filing date | Jul 2, 1996 |
| Grant date | Nov 23, 1999 |
| Priority date | — |
| Expiry date | Jul 2, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7062
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A gas containment and delivery system that can be efficiently and cost-effectively adapted to a wide variety of gas delivery needs. The system has a gas containment box that can be efficiently adapted to provide double containment for sections of toxic gas lines having gas delivery components such as valves, regulators, and gauges. The system may be either floor-mounted or wall-mounted, and can be used in a wide variety of semiconductor fabrication facilities.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.