Workpiece carrier with monopiece pressure plate and low gimbal point
US5989104A · kind A · utility
43Cited by
25References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 12, 1998 |
| Grant date | Nov 23, 1999 |
| Priority date | — |
| Expiry date | Jan 12, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/30
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A carrier for semiconductor wafers to be polished comprises a rigid upper housing, a rigid pressure plate and a gimbal mechanism connecting the plate and housing which permits the plate to gimbal or wobble relative to the housing. The pressure plate is a one-piece component and has a central cut-out portion in which the gimbal mechanism is disposed, thereby establishing a low gimbal point and reducing the incidence of tilting. The gimbal mechanism has an inner bearing ring which is fastened to the underside of the housing, and an outer bearing ring which is fastened to an outer portion of the pressure plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.