Method for preventing facet coating overspray
US5989637A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 16, 1998 |
| Grant date | Nov 23, 1999 |
| Priority date | — |
| Expiry date | Apr 16, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/0201
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method and apparatus for preventing overspray onto bonding pads of a laser bar during facet coating includes manufacturing inserts with gaskets that are aligned with the laser bar such that the gaskets mask off the bonding pads during the facet coating process so that no overspray onto the bonding pads occurs. The gaskets are preferably made of gold with a thin titanium coating to prevent thermal compression bonding with the bonding pads. The inserts with gaskets are preferably manufactured using standard wafer processing techniques. The gaskets are preferably formed using the compliant layer metalization process described in U.S. Pat. No. 5,559,817.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.