Method for manufacturing an optical information recording medium
US5989654A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 7, 1997 |
| Grant date | Nov 23, 1999 |
| Priority date | — |
| Expiry date | Jul 7, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B7/26
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for manufacturing an optical information recording medium which is usually stable and is not affected by the environmental condition and an apparatus used therefor. The method comprises the steps of placing a substrate and a member comprising a material for a film opposing each other in a vacuum film forming chamber; forming a plasma by glow discharging a gas between the substrate and the member comprising a material for a film; and supplying a gas mixture containing water to the film forming chamber before forming films or during forming films of the protective layer by the film forming method in which the material for a film freed from the member comprising a material for a film by using the plasma as an energy source are attached or deposited on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.