Membrane-actuated charge controlled mirror
US5991066A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 15, 1998 |
| Grant date | Nov 23, 1999 |
| Priority date | — |
| Expiry date | Oct 15, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An electrostatically actuated micromirror light modulator that exhibits increased deflection range, better charge efficiency and improved electrostatic stability. A thin insulating membrane decouples the electron beam from the micromirror array inside the vacuum cell. The membrane is just thick enough to stop the incident electrons from penetrating through to the mirrors but is thin enough to maintain resolution of the deposited charge pattern. An equipotential layer beneath the mirror array prevents any attractive force from being developed due to the accumulation of static charge on the surface of the light modulator that may otherwise cause the mirror to snap-over and become stuck to the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.