Surface acoustic wave mercury vapor sensors
US5992215A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 29, 1997 |
| Grant date | Nov 30, 1999 |
| Priority date | — |
| Expiry date | May 29, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0426
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface acoustic wave (SAW) sensor system and associated method for accurately measuring mercury gas concentrations. The sensor includes a SAW device that may be a SAW delay-line oscillator or a SAW resonator. The surface of the piezoelectric substrate of the SAW device includes a material suitable for amalgamation with mercury. Mercury in the gaseous environment is captured with the amalgamating material so as to cause a change in the mechanical and electrical properties on the surface of the device, thereby causing a change in the frequency output of the device. The piezoelectric substrate of the SAW device is preferably coupled to a heater to permit control of the temperature at the surface of the device. The piezoelectric substrate temperature may be regulated to produce a substantial equilibrium of mercury amalgamation/desorption kinetics. Under the conditions provided by the invention, the mercury concentration in the gaseous environment can be determined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.