Advanced wafer shipper
US5992638A · kind A · utility
18Cited by
11References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 11, 1998 |
| Grant date | Nov 30, 1999 |
| Priority date | — |
| Expiry date | Nov 11, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67386
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A package for storing and shipping semiconductor wafers or memory disks is disclosed. The carrier includes a bottom, a cover and a cassette. An improved closure arrangement is provided that not only secures the cover to the bottom, but also compensates for pressure differentials between the inside and outside of the package and provides for improved drainage during washing operations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.